片狀氧化鋁（平板狀氧化鋁）拋光粉
日期：2024-04-02 07:06:27 人氣：點(diǎn)擊：
片狀氧化鋁（平板狀氧化鋁）拋光粉
片狀氧化鋁又稱(chēng)平板狀氧化鋁拋光粉，它的用途是晶圓的拋光研磨表面處理。平板狀氧化鋁其實(shí)是一種通過(guò)特殊方法進(jìn)行長(zhǎng)晶的煅燒氧化鋁。其煅燒溫度問(wèn)1200度，制成的氧化鋁呈片狀堆積形態(tài)。通過(guò)破碎和水洗工藝，將片狀氧化鋁粉進(jìn)行分層，制成氧化鋁純度和清潔度更高，顆粒集中度窄、易分散的片狀氧化鋁微粉。不同的煅燒工藝對(duì)片狀氧化鋁的質(zhì)量影響很大，質(zhì)量好的平板狀氧化鋁晶體結(jié)構(gòu)平整，磨削面無(wú)凹凸，顆粒致密度高，硬度高，易分散不會(huì)團(tuán)聚，因此不會(huì)對(duì)硅片和晶圓造成損傷。片狀氧化鋁的晶體厚度為2-3um，顆粒直徑3-50um。
Platelet calcined aluminum oxide powder, also known as tabulated alumina polishing powder, is used for polishing and grinding the surface treatment of wafers. Flat alumina is actually a type of calcined alumina with long crystals through special methods. Its calcination temperature is around 1200 degrees, and the resulting alumina is in a stacked form. Through crushing and washing processes, the flake alumina powder is layered to produce flake alumina micro powder with higher purity and cleanliness, narrow particle concentration, and easy dispersion of alumina. Different calcination processes have a great impact on the quality of flake alumina. High quality flat alumina oxide crystals have a flat structure, no unevenness on the grinding surface, high particle density, high hardness, and are easy to disperse and not agglomerate, so it will not affect the quality of silicon wafers. Damage caused by wafer. The crystal thickness of flake alumina is 2-3um, The particle diameter is 3-50um.
片狀氧化鋁/平板狀氧化鋁的特點(diǎn)：
- 海旭磨料生產(chǎn)的片狀氧化鋁對(duì)標(biāo)進(jìn)口產(chǎn)品，可以達(dá)到進(jìn)口片狀氧化鋁粉的研磨效果。
- 晶型平整無(wú)棱角，研磨時(shí)磨粒于工件之間產(chǎn)生平面滑動(dòng)效果，不易產(chǎn)生劃痕。
- 硬度高，磨削力強(qiáng)。片狀氧化鋁具有類(lèi)似于剛玉的α-Al2O3晶相，適用與大多數(shù)材料的研磨和拋光。
- 磁性物含量低，清潔度高，粒徑一致性高。
- 熔點(diǎn)高，機(jī)械強(qiáng)度高，磨削效率高。
- 顆粒大小可控，3-50微米均可獲得。
- 顆粒的平整性使片狀氧化鋁粉體易于分散，適合制成研磨劑或研磨液。
- 耐腐蝕、化學(xué)穩(wěn)定性強(qiáng)、抗氧化性能優(yōu)越，不會(huì)于研磨液中的液體介質(zhì)發(fā)生反應(yīng)。
- 比表面積大，表面活性和附著力由于電熔剛玉。
- 片狀氧化鋁易于分散，粉體不易團(tuán)聚在晶圓表面造成堆積，影響拋光平整度。
化學(xué)成分：
| Al2O3 |
≥99.0% |
| SiO2 |
＜0.2 |
| Fe2O3 |
＜0.1 |
| Na2O |
＜1 |
物理性能：
| 化學(xué)成分 |
α-Al2O3 |
| 顏色 |
白色 |
| 比重 |
≥3.9g/cm3 |
| 莫氏硬度 |
9.0 |
生產(chǎn)規(guī)格：
| 型號(hào) |
D3(um) |
D50（um） |
D94（um） |
| HXTA40 |
39-44.6 |
27.7-31.7 |
18-20 |
| HXTA35 |
35.4-39.8 |
23.8-27.2 |
15-17 |
| HXTA30 |
28.1-32.3 |
19.2-22.3 |
13.4-15.6 |
| HXTA25 |
24.4-28.2 |
16.1-18.7 |
9.6-11.2 |
| HXTA20 |
20.9-24.1 |
13.1-15.3 |
8.2-9.8 |
| HXTA15 |
14.8-17.2 |
9.4-11 |
5.8-6.8 |
| HXTA12 |
11.8-13.8 |
7.6-8.8 |
4.5-5.3 |
| HXTA09 |
8.9-10.5 |
5.9-6.9 |
3.3-3.9 |
| HXTA05 |
6.6-7.8 |
4.3-5.1 |
2.55-3.05 |
| HXTA03 |
4.8-5.6 |
2.8-3.4 |
1.5-2.1 |
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